High efficiency amorphous/microcrystalline silicon tandem solar cells deposited in a single chamber system
单室沉积高效非晶硅/微晶硅叠层太阳电池的研究

Based on the previous research on the deposition of amorphous/microcrystalline (micromorph) silicon tandem solar cells, silane concentration for the deposition of microcrystalline bottom cell is selected to further optimize the performance for micromorph tandem solar cells by using very high frequency technique. Finally, micromorph silicon tandem solar cell with 11.02% (Area=1.0cm2) initial conversion efficiency is fabricated at a certain silane concentration, and it has a structure suitable for trapping light. Furthermore, 100cm2 micromorph module with 9.04% initial conversion efficiency is also successfully obtained.