Optical filtering and angle-resolved tuning properties of the waveguided grating structures
波导耦合纳米光栅结构的光学滤波和角分辨调谐特性

Waveguided grating structures were fabricated using interference lithography. The angle resolved tuning properties of the resonant waveguide mode and its dependence on the grating parameters and on the polarization properties of the incident light were investigated. In particular, the influence of the grating period and waveguide thickness on the tuning rate of the resonance waveguide mode was charatcerized. Theoretical simulation showed good agreement with the experimental results, which is important for futher applications of the waveguided grating device in filters and sensors.