Enhanced ferroelectricity of Pb(Zr0.5Ti0.5)O3 film by the introduction of La0.3Sr0.7TiO3 template layer
La0.3Sr0.7TiO3模板层对Pb(Zr0.5Ti0.5)O3薄膜的铁电性能增强效应的研究

LaNiO3(LNO) and LaNiO3/La0.3Sr0.7TiO3 (LNO/LSTO) bottom electrodes were prepared on Si(111) substrates by sol-gel process. Then Pb (Zr0.5Ti0.5)O3 (PZT) ferroelectric films were then deposited on the bottoms also by sol-gel process. XRD showed that both of the PZT films have perovskite structure. The one on LNO bottom adopts (100) preferred orientation and the one on LNO/LSTO bottom adopts random orientation. The results of ferroelectric measurement showed that the ferroelectricity of the PZT film on LNO/LSTO bottom electrode was substantially enhanced compare with the one on LNO bottom electrode. The coercive field was also enhanced. The film on LNO/LSTO bottom electrode has larger dielectric constant and leakage current.