全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...
物理学报  2007 

Theoretical and experimental study of grating tiling
1700 线/mm镀金光栅的拼接理论和实验研究

Keywords: tiled gratings,groove-width error,real-time inspection,grating-pair compressor
拼接光栅
,刻线密度误差,实时监控,光栅对压缩池

Full-Text   Cite this paper   Add to My Lib

Abstract:

A detailed scheme by which the status of tiled gratings can be inspected in a real-time way is put forward. The He-Ne laser is shown to be inappropriate for the grating-tiling experiment where 1740/mm grating is used. A method is proposed by which the wavelength can be selected for the real-time measurement, so that the impact of all sorts of errors of the tiled gratings on the main beam(1053nm) and the beam for measurement is completely identical, which has been demonstrated by experiment.

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133