Axial property of the inner surface of a metal tube processed by GEPSII
金属管件内壁栅极增强等离子体源离子注入的轴向特性研究

As a novel inner surface processing method, grid enhanced plasma source ion implantation (GEPSII) method can realize uniform inner surface ion implantation of a metal tube and metal binary compound can be produced. In the experiment, three 0.45% carbon steel (45-steel) work pieces were axially put on the inner surface of the tube, and golden titanium nitride (TiN) films were produced on the work pieces by GPSII. Structure analysis shows that the TiN films have the preferred crystal faces (111) and (200), and the depth of the films is about 20 nm with partial embedding in the substrate. Analysis on the electrochemistry corrosion, hardness and friction of the work pieces indicates that the surface property of the 45-steel has been greatly improved by the protective TiN film, and very good axial uniformity has been obtained.