Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation
微波ECR全方位离子注入制备类金刚石碳膜的结构及摩擦学性能研究

Diamond like carbon(DLC) films were prepared on silicon (100) wafer by microwave electron cyclotron resonance(MW ECR) plasma source ion implantation(PSII). The results showed that the films had typical properties of DLC. The films was dense and homogeneous, and the roughness and friction coefficient was low. The connection between the properties of the films and the flow ratio of hydrogen was closely. With the increase of the flow ratio of hydrogen to methane, the deposition rate and the roughness of the films decreased. The sp 3 bond obtained was more likely diamond like, which had low surface energy, consequently making the friction coefficient of the films decrease rapidly.