Structural and photoluminescence characters of SnO22:Sb thin films pr epared by rf magnetron sputtering
射频磁控溅射法制备SnO2:Sb薄膜的结构和光致发光性质研究

SnO 2:Sb films have been prepared on glass substrates by rf magnetron sputtering method. The prepared samples are polycrystalline thin films with rutile structure of pure SnO 2 and have orientation of 110] direction. The photoluminescence of the samples was measured at room temperature. An ultraviolet-violet luminescence peak near 392nm was observed. The effect of different oxygen partial pressures on the structure and luminescence was investigated, and the luminescent mechanism was also tentatively investigated.