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物理学报 2002
A study on TiO2 thin films deposited by hydrothermal technique
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Abstract:
TiO 2 thin films were deposited on glass substrates by hydrothermal technique. The XRD, XPS and SEM were used to characterize the TiO 2 thin films as well as TiO 2 powders. The optical properties of the films prepared under different hydrothermal conditions were studied in details. The as prepared films were anatase, homogenous, dense and crack free. The films were transparent to visible light, and showed excellent absorbency of UV light.
