Application of Monte Carlo simulation to the research of ions transport plasma sheaths of glow discharge
蒙特卡罗模拟在辉光放电鞘层离子输运研究中的应用

In this paper, Monte Carlo method was used to simulate the motion of ions in t he cathode fall zone of glow discharge. Energy distributions and angle distribu tions at different pressures and voltages are presented. The simulations are b ased on two main scattering processes of charge transfer and elastic scattering. Either the ion energy dependence or independence of collision cross-section s is taken into account. For elastic scattering, the potential interactio n and hard-sphere models are considered. The parameter Pd c has a great in fluence o n the energy distribution, but the angle distribution of ions is not sensitive t o di scharge parameters. Simulation results obtained by different models have been co mpared and discussed. The model that includes charge transfer and potential inte raction scattering processes and is based on the dependence of collision cross- section on the ion energy is obviously the best.