THE NUCLEATION THERMODYNAMICS OF DOT STRUCTURE GROWTH IN THE GROOVE STRUCTURE
生长于微结构内点状结构的成核热力学

The nucleation thermodynamics of dot structure in the groove structure of substrate surface by vapor deposition has been studied. A growth model of dot structure by controlling the nucleation taking place in the designed microscopic structure was suggested. The Gibbs free energy of the critical nuclei formation in the groove structure was calculated, and found that the groove structure can effectively promote the nucleation. Finally, considering the groove structure trapping effect, we deduced that the growth rate of the stable atomic cluster in the groove structure is larger than that of the atomic cluster on a flat surface.