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物理学报  2000 

EPITAXIALL GROWTH OF CUBIC AND HEXAGONAL GaN FILMS ON GaAs(001) SUBSTRATES BY MBE
GaAs(001)衬底上分子束外延生长立方和六方GaN薄膜

Keywords: 砷化镓,分子束外延生长,氮化镓薄膜

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Abstract:

GaN films of about 300nm were grown on GaAs(001) substrates by molecular beam epitaxy (MBE).X-ray double-crystal diffraction and room-temperature photoluminescence measurements show that the films grown on nitridized GaAs nucleation layer are pure cubic GaN while the films grown on nitridized AlAs nucleation layer are pure hexagonal GaN.The present study shows that the phase of GaN samples grown on GaAs substrates can be controlled using different nucleation layers

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