Single-step in-situ preparation of magnesium diboride superconducting thin films by dc magnetron sputtering
直流磁控溅射一步法原位制备MgB2超导薄膜

In a single-step in-situ procedure,the superconducting MgB 2 (101) highly oriented thin films have been successfully grown on the SrTiO 3 (100) substrates by using the synthesised MgB 2 target and controlling the magetron sputtering working at the state of abnormal glow discharge or arc discharge.The fillms have a zero resistance transition temperature of 15K and an onset transition temperature of 33K.