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物理学报  1992 

CALCULATION OF THE MEAN PROJECT RANGE OF MeV HEAVY IONS IN SOLID TARGETS
MeV重离子在固体靶中的平均投影射程计算

Keywords: 固体,离子注入,高能,平均投影射程

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Abstract:

Based on Biersack's angular diffusion model, an effective method was established for calculating the mean project range of MeV heavy ions in solid targets. The calculated values are compared with recent experimental data on the mean project range for 1.0 MeV In+, Xe+, Ta+ and 1.0-2.0 MeV Pb+ The maximum difference-between present calculated values and experimental data is less than 8%, but the maximum differences between experimental data and calculated values by TRIM 86 and PRAL are 23% and 22%, respectively- The results show that the present calculation procedure is sucsessful for predicting the mean projected range on 1.0-2.0 MeV such heavy ions as In+, Xe+, Ta+ and Pb+ implanted in solid target (Si).

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