Sediment and sputtering during ion collection
离子引出收集的沉积与溅射研究

This thesis focuses on sediment and sputtering during ion collection, presented a mathematical Physics model for ion sediment and sputtering. The important points lie in binding energy, trapping probability and sputter coefficient, those physics and formulas, provide the number of deposited and lost particles. Simulated the collector, difference projectile energy, projectile ion element sediment coverage and different elements target influence the sputtering characteristic. The conclusion is:The more coverage, the more sputter coefficient; The ion collection voltage isn't higher, better; Lighter ion, deposited probability smaller; Ion deposition and sputtering characteristic have something with target quality, light material is better to improving the collect probability.