On micro scanning forces under the coupling deformation of atomic force microscope probe
原子力显微镜探针耦合变形下的微观扫描力研究

Micro cantilever probe of atomic force microscope (AFM) is a typical micro mechanical component, which is under a coupling deformation during the contact scanning process. Numerical simulations of micro scanning forces and micro topography are presented to investigate the influence of the coupling deformation of AFM probe under the AFM contact mode. It is demonstrated that the normal scan force is actually not constant, which is coupled with the lateral force on an asperity of sample surface, increasing together uphill and decreasing together downhill. The coupling relationship increases with the surface slope, tip height, etc. Coupling deformation of the probe proves to play a minor role on the AFM micro topography image and the perpendicular scan force. However, surface slope plays an important role on the variation of lateral force, and the peak positions of lateral force are not accordant with that of surface topography. These results are in good agreement with those previous AFM experiments.