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物理学报  2002 

Molecular dynamics simulations of low-energy Pt cluster deposition
低能Pt原子团簇沉积过程的分子动力学模拟

Keywords: molecular dynamics simulation,low energy cluster,energetic deposition
分子动力学模拟
,低能原子团簇,载能沉积

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Abstract:

Molecular dynamics simulations have been applied to the investigation of the deposition of low energy Pt 38 , Pt 141 , and Pt 266 clusters on Pt(001) surface. The evolution process of cluster deposition with atomic average kinetic energies ( E a) of 0.1, 1.0 and 10eV and the effects on the substrate surface morphology have been analyzed. Simulation results show that E a is an important parameter to describe behaviours of the clustes. Clusters with low E a cannot damage the surface lattice seriously and the clusters can be considered as a deposition cluster. The power of cluster damaging surface lattice increases with the increase of E a. When E a=10eV, the clusters can implant into the substrate. The effects of low energetic clusters on substrate surface morphology are also determined by E a. The effects of clusters with more atoms, however, are stronger than that with fewer atoms. The mechanisms of the interactions between low energy clusters and substrate surface are also discussed in this paper.

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