ELECTRON TRANSPORT PROCESS IN CATHODE SHEATH OF HELIUM dc HOLLOW CATHODE GLOW DISCHARGE PLASMA
直流空心阴极放电中鞘层区电子的输运过程

In this paper, the electron transport process in cathode sheath of helium dc hollow cathode glow discharge is studied by using Monte Carlo simulation. The electron is accelerated between collisions by the non-uniform electric field of the hollow cathode sheath. The electron free flying time between collisions is determined by collision frequency of electron with neutral particle. The experimental data of collision cross section are fitted to semi-experience expressions. The electron mean energy and spatial energy distribution, and other parameters distribution are studied. The results are in good agreement with experimental ones.