ANALYSIS OF THE LATTICE IMAGE OF INTERFACE BETWEEN AMERPHOUS REGION AND CRYSTALLINE REGION IN GaAs WITH OPTICAL DIFFRACTOMETER
GaAs中非晶态与晶态界面晶格象的光衍射分析

We analysed the high resolution lattice image of interface between crystalline region and amorphous region produced by ion implantation in GaAs with optical diffra-ctometer. The preliminary results show the structure variation at the interface. There are five districts from amorphous to crystalline region. They are: amcrphous area; nuclei, crystallite and low dimensional ordered area; polycrystalline area; distorted mo-nocrystalline area; and monocrystalline area.