A MASS TRANSFER MODEL FOR THE PLASMA DEPOSITION PROCESS IN AXIAL-FLOW REACTOR
管式等离子体化学气相沉积质量转换动力过程的研究

A kinetic model for the glow discharge plasma deposition process in the axial-flow reactor is proposed. In particular, the realtionships between the deposition characteristics (i.e., generation rate, generation frequency, deposition rate, and gas efficiency) and the process parameters (gas flow rate and gas pressure) are examined by numerical modeling technique. Some results has been explained.