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物理学报  1995 

X-RAY DIFFRACTION PHASE DEPTH PROFILING FOR POLYCRYSTAL WITH CONTINUOUS PHASE DEPTH DISTRIBUTION
连续过渡型多晶物相深度分布的X射线衍射测试方法

Keywords: 多晶,物象,深度分布,X射线衍射测量

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Abstract:

A new X-ray powder diffraction method is reported to test phase depth distribution quantitatively and non-destructively. In case of the incident angle is larger than the total reflection critical angle, it is possible to quantitatively measure the polycrystalline phase depth profile in real scale. It can be used to the sample of continuous phase depth distribution. The method was verified with computer simulation and experiment of practical sample.

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