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物理学报  1991 

MODIFICATION OF MICROSTRUCTURE AND PROPERTIES OF ION PLATED TITANIUM NITRIDE FILM BY ADDING YTTRIUM
添加Y改善离子镀氮化钛膜的结构与性能

Keywords: 稀土元素,离子镀,氮化钛,镀膜

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Abstract:

The microstructure and properties of ion plated titanium nitride film can be improved by adding rare earth element yttrium. Y-modified titanium nitride (Ti(Y)N) film exhibits an excellent corrosion resistance and binding strength to the substrate of A3 steel. The microstructure characteristics of Ti(Y)N/A3 system have been investigated by X-ray diffraction, ion probe mass analysis and cross section transmission electron microscopy. The results show that yttrium is enriched at the interface of Ti(Y)N/A3 system and the modification of Y at the interface leads to a very good metallurgical transition band from the substrate to the film and the preferential orientation along close-packed TiN(lll) crystal plane, which may be the major reasons for the improvement of the properties of the Ti(Y)N film.

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