ELECTRON ENERGY DISTRIBUTION AND TRANSPORT COEFFICIENTS IN ELECTRICALLY EXCITED KrF AND ArF
放电激励KrF,ArF激光器中电子能量分布函数和输运系数的计算

Electron energy distributions and transport coefficients have been calculated for He-Kr, Ne-Kr, He-Ar and Ne-Ar mixtures by using Boltzmann stability equation. The calculated results are discussed.