FRACTURE STRENGTH STUDIES OF POLYCRYSTALLINE DIAMOND FILMS PRODUCED BY DC PLASMA CVD
直流等离子体CVD法合成的金刚石膜的断裂强度研究

The fracture strength of Polycrystalline diamond films produced by DC plasma CVD is investigated. The fracture strength of circular diamond film was measuned by a burst pressune technique. Experimental results have shown that the fracture strength is considerably dependent on grain size, sample thickness, apertune radius, methane concentration and substrate temperature. The results have also been discussed.