STUDY OF VALENCE-BAND PROPERTIES IN a-Si1-xCx:H BY UV PHOTO-ELECTRON SPECTROSOPY
用紫外光电子能谱研究a-Si1-xCx:H的价带特性

We studied the valence-band (VB) spectra of hydfogenated amorphous silieon-earbon alloy film (a-Si C:H:) by means of UPS technique and analysed the influence of doping and surface oxidation on VB spectra. Accompanied with XPS and AES analysis, we preliminarily investigated the distribution and bonding property of valence electrons in the alloy films.