MEASUREMENT OF DISCHARGE CIRCUIT DISTRIBUTIVE INDUCTANCE FOR BLUMLEIN EXCIMER LASER
Blumlein型准分子激光器放电回路的分布电感测量

Technique on measuring discharge current of Blumlein circuit using magnet-light method is described briefly in this paper. The more exact method estimating distributive inductance of discharge circuit is presented. The circuit equations are solved and the analytic expression of distributive inductance is derived. Finally, the calculated result is discussed.