Measurement of Micro-scale Experimental Mechanics Based on Stage of Optical and Scanning Microscopes
基于光学和扫描显微平台的微尺度实验力学检测技术和装置研究

The paper presents an overview of the new micro-scale experimental mechanics concepts,methods and devices of optical and scanning microscopic stages developed at photomechanical laboratory of Tsinghua University.The research includes micro speckle interferometry,micro marker method,optical probe method,grain deformation and movement analysis.In particular,it also describes several devices and measurement systems developed in our group,which are double-field-of-view speckle interferometer for thin film tensile test,microscopic speckle interferometry which enables an alternative usage of conventional specular interferometry(CSI),ESPI,TSIP and phase shifting for micro-object shape,in-plane and out-of-plane displacement measurements,micro marker measuring stage for local zone deformation measurement,uniaxial tensile setups using in AFM and SEM measuring stages for micro-objects and thin films testing and other instruments for micro-objects testing,such as positioning and loading system,micro force sensor and programmable driving systems of translation platform and displacement sensor.To prove the applicability of these methods and devices,some applications of measurement examples are given and the problems and further research on micro-scale experimental mechanics are discussed.