Digital Speckle Correlation Method and Its Application under SEM
扫描电镜下的数字散斑相关方法及其应用

The application of digital speckle correlation method (DSCM) under scanning electron microscope(SEM) is studied in the paper.The process of a combination of the DSCM and SEM with servo is described.And the meso-scale and micro-scale deformation field measurement is implemented.The research extends the application fields of the DSCM and the SEM.In order to quantificationally study the effect of excursion during SEM scanning on the DSCM,the precision and error of the DSCM under the SEM are analyzed experimentally.Results indicate that the displacement error may reach 2 pixels mainly owing to the excursion of the SEM.The error of mechanical system can be enlarged at bigger magnification.And the precision of the DSCM can satisfy the measurement requirement under a SEM at the submicron scale.As illustration,a three point bending experiment of concrete specimen was carried out.The nonuniform deformation fields of concrete specimen under different load were measured in meso-scale.