Fabrication and Application of Microscale Deformation Carrier based on FIB
基于FIB的微观变形载体制作技术研究及应用

Deformation carriers, including grating, speckle and dot, are important for optical deformation measurement, which is related to the success or failure of measurement. Based on FIB micromachining system and techniques, the designing, fabrication method and procedure of microscale deformation carriers are introduced in this paper. The measurement of microscale residual stress on material surface was realized by using FIB drilling and cutting. The influence of deformation carriers fabricated by FIB on the original structure and the corresponding measurement errors of residual stress were analyzed and discussed. Results show that microscale deformation carriers can be conveniently fabricated by FIB direct writing, and the target area can be accurately located and clearly imaged by switching view-fields of microscope. In addition, it's effective for microscale mechanical testing, especially for residual stress measurement.