Synthesis of ZnO Nanostructures Using Domestic Microwave Oven Based Remote Plasma Deposition System

ZnO nanostructures were deposited on various substrates like glass, Si wafer and Al2O3/Si substrates using microwave oven based plasma deposition system at oxygen and atmospheric plasma conditions. Various morphologies were exhibited by the ZnO nanostructures grown on different substrates depending on Zinc salt concentration, plasma source and substrate material.