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Design and Analysis of MEMS based Composite Piezoelectric Ultrasonic Transducer

DOI: 10.5923/j.eee.20120206.04

Keywords: MEMS Composite Transducer, Susceptance Analysis, COMSOL Multiphysics 4.2a

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Abstract:

With the rapid growth of technology, micro scale devices are playing a dominant role in mechanical and optoelectronic devices. Characteristics like miniaturization, multiplicity and microelectronics help these devices to sense, control and actuate on micro scale with effects on macro scale. Micro devices like composite transducers are widely used in medical, industrial and space applications because they are relatively simple and easy to interface with other devices and also provide better resolution and easy installation. The present work reports the design and simulation of composite piezoelectric ultrasonic transducer, where susceptance was computed by applying AC potential for various piezoceramic materials i.e., Nepec 6, Quartz, Pzt-8. In this, an eigen frequency analysis is followed by a frequency response analysis to calculate the input admittance as a function of the excitation frequency. To make this design, COMSOL Multiphysics software is used. The transducer designed with PZT-8 has exhibited better sensitivity than others. These transducers are widely used in non-destructive testing (NDT), welding, machining, medical imaging etc.

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