Modelado analítico de un micro generador de potencia basado en tecnología MEMS y materiales piezoeléctricos

in this work is presented an analytical modeling for a power microgenerator in order to obtain the most important figures of merit such as: voltage, generated power and displacement, in a harvesting energy system. the model compares three different piezoelectric materials: lead zirconate titanate (pzt), zinc oxide (zno) and barium titanate (batio3), taking in account the properties of materials and the parameters of the structure for designing more efficient harvesting devices. the modeling was done with a mass-spring-damper piezo system in conjunction with a storage energy system. the results of simulation showed that the pzt generated more power in comparison with the others, and the zno generated more voltage, which is an advantage where a system requires operate with more voltage than current. this analytical modeling was capable to predict the mechanical-electrical behavior of a piezoelectric microgenerator, which is very helpful in the design of mems harvesting devices for applications where the energy produced by the human movements can be collected.