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Dise?o y evaluación de un reactor de plasma térmico para síntesis de Nitruro de aluminio

Keywords: synthesis, aluminum nitride, aluminum oxynitride, thermal plasma, nitriding, carbonitriding.

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Abstract:

in this article a new design for a thermal plasma reactor with expansion chamber for aluminum nitride (aln) synthesis is proposed. the new reactor was constructed of stainless steel (aisi 304), and this was proved with a high temperature direct nitriding process of aluminum chloride and with a thermal carbonitriding process of gibbsite. the product obtained in the direct nitriding runs, was aln with approximately 90% purity; while the aln obtained in the carbonitriding test was mixed with other minor products, such as corundum and aluminum oxynitride. a reaction mechanism is proposed to explain the decomposition of the solid precursor and nucleation of the aln.

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