Quantitative characterization of the mechanical properties of materials
in micro-/nano-scale using depth-sensing indentation technique demands high performance
of nanoindentation instruments in use. In this paper, the efforts to calibrate
the capacitive force transducer of a commercial nanoindentation instrument are presented,
where the quasi-static characteristic of the force transducer has been calibrated
by a precise compensation balance with a resolution of ~1 nN. To investigate the
dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical
System) based on nano-force transfer standard with nano-Newton (10-9 Newton)
resolution and a bandwidth up to 6 kHz have been employed. Preliminary
experimental results indicate that1) the force transducer under calibration has a
probing force uncertainty less than 300 nN (1σ) in the calibration range of 1 mN; 2) the transient duration
at contact points amounts to 10 seconds; 3) the overshoot of
engagement is pre-load dependent.
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S. Gao, Z. K. Zhang, Y. Wu and K. Herrman, “Development of a Multifunctional Microelectromechanical NanoForce Actuator for Calibration of the Spring Constant of an AFM Cantilever,” Proceedings of the 9th Euspen International Conference, San Sebastian, 2-5 July 2009, pp. 267-270.
K. Hiller, M. Kuechler, D. Billep, B. Schroeter, M. Dienel, D. Scheibner and T. Gessner, “Bonding and Deep RIE: A Powerful Combination for High-Aspect-Ratio Sensors and Actuators,” Proceedings of SPIE 5715, Micromachining and Microfabrication Process Technology X, San Jose, 11 April 2005.
S. Gao, Z. K. Zhang, Y. Wu and K. Herrmann, “Towards Quantitative Determination of the Spring Constant of a Scanning Force Microscope Cantilever with a Microelectromechanical Nano-Force Actuator,” Measurement Science and Technology, Vol. 21, No. 1. 2010, Article ID: 015103.