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Summary of Research Status and Application of MEMS Accelerometers

DOI: 10.4236/jcc.2018.612021, PP. 215-221

Keywords: MEMS Technology, MEMS Accelerometer

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The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.


[1]  [1] Amarasinghe, R., Dao, D.V., Toriyama, T., et al. (2007) Development of Miniaturized 6-Axis Accelerometer Utilizing Piezoresistive Sensing Elements. Sensors and Actuators A: Phsical, 134, 310-320.
[2]  Tsai, M.H., Liu, Y.C., Sun, C.M., et al. (2010) A CMOS-MEMS Accelerometer with Tri-Axis Sensing Electrodes Arrays. Procedia Engineering, 5, 1083-1086.
[3]  Kanda, K., Iga, Y., Matsuoka, J., et al. (2010) A Tri-Axial Accelerometer with Structure-Based Voltage Operation by Using Series-Connected Piezoelectric Elements. Procedia Engineering, 5, 894-897.
[4]  Yoon, K., Soh, S., Seok, B., et al. (2005) A New Wearable Input Device: SCURRY. IEEE Transaction on Industrial Electronics, 52, 1490-1499.
[5]  Rockstad, H.K., Tang, T.K., Reynolds, J.K., Henny, T.W., Kaiser, W.J. and Gabrielson, T.B. (1996) A Miniature High-Sensitivity Electron Tunneling Accelerometer. Sensors and Actuators A, 53, 227-231.
[6]  Aaltonen, L. and Halonen, K. (2009) Continuous-Time Interface for a Micromachined Capacitive Accelerometer with NEA of 4μg and Bandwidth of 300 Hz. Sensors and Actuators A: Phsical, 154, 6-56.
[7]  Pinto, D., Mercier, D., Kharrat, C., et al. (2009) A Mall and High Sensitivity Resonant Accelerometer. Procedia Chemistry, 1, 536-539.
[8]  Cao, Y.Z., Cai, W.C. and Cheng, W. (2010) Human Body Attitude Detection Technology Based on MEMS Accelerometer. Nanotechnology and Precision Engineering, No. 1, 37-40.
[9]  Thomas, S., Benjamin, P., Niels, H., et al. (2008) Gesture Recognition with A Wii Controller. Second International Conference on Tangible and Embedded Interaction-Conference Proceedings, No. 16, 11-14.
[10]  Chung, L.J. (2008) Hacking the Nintendo Wii Remote. IEEE Pervasive Computing, 7, 39-45.
[11]  Su, W.J. and Su, J. (2008) Application of Acceleration Sensor in Vehicle Braking Performance Detection. Industrial Control Computer, No. 2, 74-75.
[12]  Kevin, T.C.C., Han, D., Ravinder, P.S., et al. (2010) 118-dB Namic Range, Continuous-Time, Opened-Loop Capactance to Voltage Converter Readout for Capacitive MEMS Accelerometer. Solid State Circuits Conference. IEEE, 1-4.
[13]  Chen, W. (2014) Research on Key Technology of High Precision Attitude Measurement Based on MEMS Inertial Sensor. Master’s Thesis, Zhejiang University, Hangzhou.
[14]  Brown, T. and Davis, B. (2001) Strap-Down Micro-Electro-Mechanical (MEMS) Sensors for Higher Munition Applications. IEEE Transactions on Magnetic, 37, 336-342.
[15]  Dang, A.G. and Li, X.J. (2014) Review and Prospect of the Development of Earth-Drilling Weapons Abroad. No. 6, 35-39.
[16]  Last, H., Deeds, M., Garvic, D., et al. (1999) Nanoto Milli-Meter Scale Integrated Systems. IEEE/Tansactions on Components and Packaging Technologies, No. 22, 138-142.
[17]  Shen, Q. and Li, S.Y. (2002) Calculation of Ballistic Parameters of Ballistic Correction Fuze Based on MIMU and Its Precision Requirements for MIMU. Journal of Detection and Control, 24, 35-39.


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