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Physics  2003 

On the applicability of Sato's equation to capacitative radio frequency sheaths

DOI: 10.1088/0022-3727/33/24/101

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Abstract:

We show that the time dependent version of Sato's equation, when applied to capacitative rf sheaths is no longer independent of the electric field of the space charge, and discuss the use of the equation for a specific sheath model.

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