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Mathematical modelling of error contribution for various dimensions of capacitive sensors from centimetric to nanometric range

Keywords: fringing effect , compliant electrode , capacitive sensors , guarding

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Abstract:

Aim of this paper is mathematical analysis of the contribution of fringingeffect in sensing performance of electrostrictive capacitive sensors. Study oncapacitive sensors having separation between plates in nanometric range and areain centimetric range reveals that error due to fringing effect is of the order of 10-5and therefore can be neglected particularly for area greater than 5x10-4 sqm. Incase of nanometric capacitive sensors having both area of plates and separationbetween them in nanometric range, the percentage error due to fringing effect hasbeen found to be as high as 8.53% and therefore cannot be ignored for sensitivityconsideration of capacitive sensors. The study also includes variation of fringingeffect with distance between plates and area of plates in micrometric andmillimetric capacitive sensors and it is observed that error is on higher side to beignored. Few of capacitive sensors exhibiting minimum contribution fromfringing effect have also been suggested for constructional design.

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