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Measurement of Bonding Strength of Magnetic Sputtered TiN Coatings by Indentation Method
磁控溅射TiN界面结合强度的压痕法测试

Keywords: TiN,adhesion strength,Hertzian contact
结合强度
,氮化钛涂层,磁控溅射,压痕法测试

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Abstract:

The modified formula for calculation of elasto plastic Hertzian contact stress was established. The formula was adopted to calculate the bonding strength of magnetic sputtered TiN coatings and compared with the experimental one. At the same time, the factors affecting the bonding strength of the coatings are discussed as well. As the results, the bonding strength of magnetic sputtered TiN coatings is greatly affected by the substrate surface roughness. In comparison with the other methods for measurement of the bonding strength of coatings, the current method has been found to be applicable and convenient for the bonding strength evaluation of coatings.

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