|
|
Sensors 2003
The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysisDOI: 10.3390/s30800285 Keywords: Thin film, spray pyrolysis, Gas sensor, ITO Abstract: In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.
|
