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Sensors  2003 

The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

DOI: 10.3390/s30800285

Keywords: Thin film, spray pyrolysis, Gas sensor, ITO

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Abstract:

In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.

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