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Investigation of the polysilicon p--i--n diode and diode string as a process compatible and portable ESD protection device
多晶PIN二极管及二极管串作良好工艺兼容并可移植ESD保护器件的研究

Keywords: Polysilicon p-i-n diode,ESD(Electro-Static Discharge),polysilicon p-i-n diode string
多晶PIN二极管,静电保护,多晶PIN二极管串

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Abstract:

The polysilicon p-i-n diode displayed noticeable process-compatibility and portability in advance technologies as ESD protection device. The paper presented reverse breakdown, current leakage and capacitance characteristics for the fabricated polysilicon p-i-n diode. To evaluate ESD robustness forward and reverse TLP I-V characteristics were measured also. Besides polysilicon p-i-n diode string was investigated to further reduce capacitance and fulfill the requirements of tunable cut-in or reverse breakdown voltage. To explain the effects of device parameter, analysis and discussion about the inherent properties of polysilicon p-i-n diode were processed finally.

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