The studies on structure and electrical characteristic of Nb-doped SrTiO3 (SNTO) substrates by XRD, Hall measurements, R-T and SEM, show that the SNTO substrates with the same Nb-doping concentration have different electrical properties because of the nonuniformity of Nb-doping. The uniformly doped high-quality substrates are extremely important for fabricating multilayer structure and devices. In addition, the experimental results also provide us with SEM method to judge the uniformity of conducting material.
