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柔性Pb(Zr0.53Ti0.47)O3薄膜在被动结构健康监测方面的应用
Application of Flexible Pb(Zr0.53Ti0.47)O3 Thin Film in Passive Structure Health Monitoring

DOI: 10.12677/APP.2020.103025, PP. 198-204

Keywords: 柔性PZT薄膜，压电性，Lamb波，被动监测
Flexible PZT Film, Piezoelectric, Lamb Wave, Passive Monitoring

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Abstract:

本文利用脉冲激光沉积技术成功制备了沿(111)外延生长的锆钛酸铅(Pb(Zr0.53Ti0.47)O3, PZT)薄膜，选用的衬底材料为层状可剥离氟晶云母(mica)。mica衬底通过机械剥离可得到柔性的PZT外延薄膜。同时测试了刚性PZT外延薄膜样品压电系数d33 (24 pm/V)，并与机械剥离刚性云母衬底后薄膜的压电系数(110 pm/V)进行了对比，发现柔性PZT薄膜的压电系数大于刚性PZT薄膜的压电系数。在结构健康监测中，被动监测手段广泛应用于飞行器、航天器、大型设备中。本文报道了利用柔性PZT薄膜实现被动监测，其中，压电薄膜在两种能量冲击下的峰值在经过电荷放大器放大100倍后可以实现压电陶瓷在被动监测中基本一致的效果，证明压电薄膜可以向被动冲击监测的应用方向上使用。
Lead zirconium titanate (Pb(Zr0.53Ti0.47)O3, PZT) epitaxial thin films grown along (111) direction can be successfully prepared by pulsed laser deposition. The mica substrate has been mechani-cally stripped to obtain a flexible PZT film. Meanwhile, the piezoelectric coefficient d33 (24 pm/V) of the rigid PZT epitaxial thin film was tested and compared with that of the thin film after me-chanical stripping (110 pm/V). It was found that the piezoelectric coefficient of the flexible PZT thin film was larger than that of the rigid PZT thin film. In structural health monitoring, passive monitoring is widely used in aircraft, spacecraft and large equipment. In this paper, flexible PZT thin film was used to realize passive monitoring, in which the peak value of piezoelectric film un-der two kinds of energy shocks can be amplified by charge amplifier by 100 times to achieve basically the same effect of piezoelectric ceramics in passive monitoring. The results proved that piezoelectric film can be used in the application of passive impact monitoring.

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