|
- 2018
基于气体基压电复合材料的线聚焦空耦超声传感器研制与应用
|
Abstract:
空气耦合式超声检测技术因具有非接触、无损伤等特点,被广泛应用于材料的非接触检测。本文从晶硅太阳能电池的实际检测需求出发,设计并制作了一种气体基线聚焦空气耦合(空耦)式超声传感器,与传统的聚合物基空气耦合(空耦)式超声传感器相比,气体基线聚焦空耦传感器利用了3D打印技术将聚合物基框架改进为镂空结构,进一步降低了压电复合材料的声阻抗。所研制的传感器中心频率约为150 kHz,聚焦半径为20 mm,孔径为28 mm。对传感器进行了激励接收性能测试,并采用空耦超声Lamb波检测技术,对含有裂纹缺陷的单晶硅太阳能电池片进行非接触式检测,通过分析接收信号的幅值信息并利用相关系数法,完成了对裂纹缺陷的检出和定位,实现了气体基线聚焦空耦传感器在缺陷检测中的应用。 Air-coupled ultrasonic testing technology, possessing the characteristics of non-contact and non-destruction, is widely used in nondestructive detection for materials. An air-based line-focus air-coupled ultrasonic transducer was designed and fabricated according to the measurement of crystalline silicon solar cells. Compared to the ultrasonic transducer based on the traditional polymer matrix, the air-based line-focus air-coupled ultrasonic transducer adopted the 3D printing method to hollow out the polymer matrix frame, which will further reduce the acoustic impedance of piezoelectric composites. The center frequency of the transducer is about 150 kHz, and the focus radius is 20 mm, aperture is 28 mm. The generating and receiving performance of the transducer was measured. An crack detection experiment was implemented on a monocrystalline solar cell by air-coupled Lamb waves. The crack can be located by analyzing the amplitude of the received signals, furthermore, a correlation analysis was performed to extract the characteristics of the cracks. 国家自然科学基金(11372016;51505013);国家自然科学基金重点项目(51235001)
[1] | FUYUKI T, KITIYANAN A. Photographic diagnosis of crystalline silicon solar cells utilizing electroluminescence[J]. Applied Physics A:Materials Science & Processing, 2009, 96(1):189-196. |
[2] | BELYAEV A, POLUPAN O, DALLAS W, et al. Crack detection and analyses using resonance ultrasonic vibrations in full-size crystalline silicon wafers[J]. Applied Physics Letters, 2006, 88(11):111907. |
[3] | 党长久. 1-3型压电复合材料[J]. 应用声学, 1995, 14(1):2-7. DANG C J. 1-3 piezoelectric composite materials[J]. Applied Acoustics, 1995, 14(1):2-7(in Chinese). |
[4] | 黄世峰, 叶正茂, 王守德, 等. 1-3型水泥基压电复合材料的制备及性能[J]. 复合材料学报, 2007, 24(1):122-126. HUANG S F, YE Z M, WANG S D, et al. Fabrication and properties of 1-3 cement based piezoelectric composites[J]. Acta Materiae Compositae Sinica, 2007, 24(1):122-126(in Chinese). |
[5] | 仲林建, 陈俊波, 王世全. 1-3型压电复合材料的制备及性能分析[J]. 声学与电子工程, 2007(1):31-34. ZHONG L J, CHEN J B, WANG S Q. 1-3 piezoelectric composite material preparation and performance analysis[J]. Acoustics and Electronics Engineering, 2007(1):31-34(in Chinese). |
[6] | BHARDWAJ M. Piezoelectric transducer with gas matrix:United States Patent, 7382082[P]. 2003-1-7. |
[7] | 张凯. 1-3型压电复合材料换能器研究[D]. 哈尔滨:哈尔滨工程大学, 2009. ZHANG K. The research of 1-3 piezocomposite transducer[D]. Harbin:Harbin Engineering University, 2009(in Chinese). |
[8] | 黄世峰, 刘亚妹, 郭丽丽, 等. 不同压电陶瓷体积分数对1-3-2型压电复合材料性能的影响[J]. 硅酸盐学报, 2009, 37(6):922-926. HUANG S F, LIU Y M, GUO L L, et al. Influence of volume fraction of piezoelectric ceramics on properties of 1-3-2 piezoelelctric composites[J]. Journal of the Chinese Ceramic Society, 2009, 37(6):922-926(in Chinese). |
[9] | 熊贵, 张洋洋. 低声阻抗0-3型PZT/PT/PVDF压电复合材料的研制[J]. 电子元件与材料, 2010, 29(12):18-20. XIONG G, ZHANG Y Y. Development of 0-3 type PZT/PT/PVDF piezoelectric composites with low acoustic impedance[J]. Electronic Components and Materials, 2010, 29(12):18-20(in Chinese). |
[10] | 刘亚慧. 聚焦换能器的设计和声场的模拟[D]. 西安:陕西师范大学, 2009. LIU Y H. The design and sound field simulation of the focused transducer[D]. Xi'an:Shaanxi Normal University, 2009. |
[11] | 赵立华, 易辉, 费玖海, 等. 太阳能晶硅电池片印刷工艺及工艺物化初步研究[J]. 电子工业专用设备, 2012(213):15-20. ZHAO L H, YI H, FEI J H, et al. Primary research on solar cell printing process and process materialization[J]. Equipment for Electronic Products Manufacturing Resources and Power, 2012(213):15-20(in Chinese). |
[12] | 刘增华, 樊军伟, 何存富, 等. 基于概率损伤算法的复合材料板空气耦合Lamb波扫描成像[J]. 复合材料学报, 2015, 32(1):227-235. LIU Z H, FAN J W, HE C F, et al. Scanning imaging of composite plate using air-coupled Lamb waves based on probabilistic damage algorithm[J]. Acta Materiae Compositae Sinica, 2015, 32(1):227-235(in Chinese). |
[13] | HAYWARD G, BENNETT J, HAMILTON R. A theoretical study on the influence of some constituent material pro-perties on the behavior of 1-3 connectivity composite transducers[J]. Journal of the Acoustical Society of America, 1995, 98(4):2187-2196. |
[14] | HE C F, WANG Y Y, LU Y, et al. Design and fabrication of air-based 1-3 piezoelectric composite transducer for air-coupled ultrasonic applications[J]. Journal of Sensors, 2016, 2016:4982616. |
[15] | 宋国荣, 何存富, 黄垚, 等. 小试件材料弹性常数超声测量系统的研制[J]. 仪器仪表学报, 2006, 27(9):1012-1015. SONG G R, HE C F, HUANG Y, et al. Design of line-focus PVDF ultrasonic for elastic constant measurement of limited-size samples[J]. Chinese Journal of Scientific Instrument, 2006, 27(9):1012-1015(in Chinese). |
[16] | CEPEL R, HO K C, RINKER B A, et al. Spatial correlation coefficient images for ultrasonic detection[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2007, 54(9):1841-185. |
[17] | 李芬, 陈正洪, 何明琼, 等. 太阳能光伏发电的现状及前景[J]. 水电能源科学, 2011, 29(12):188-192. LI F, CHEN Z H, HE M Q, et al. The present situation and prospect of solar photovoltaic power generation[J]. Water Resources and Power, 2011, 29(12):188-192(in Chinese). |
[18] | 刘鹤. 太阳能电池缺陷检测系统的软件设计[D]. 武汉:华中科技大学, 2009. LIU H. A Dissertation submitted in partial fulfillment of the requirements for the degree of master of engineering[D]. Wuhan:Huazhong University of Science and Technology, 2009(in Chinese). |
[19] | DATTA A, SONG M, WANG J, et al. Photoluminescence spectrum from heterojunction with intrinsic thin layer solar cells:An efficient tool for estimating wafer surface defects[J]. Journal of Non-Crystalline Solids, 2012, 358(17):2241-2244. |
[20] | BELYAEV A, POLUPAN O, OSTAPENKO S, et al. Resonance ultrasonic vibration diagnostics of elastic stress in full-size silicon wafers[J]. Semiconductor Science and Technology, 2006, 21(3):254-260. |
[21] | 周正干, 魏东. 空气耦合式超声波无损检测技术的发展[J]. 机械工程学报. 2007, 44(6):10-14. ZHOU Z G, WEI D. Progress of air-coupled ultrasonic non-destructive testing technology[J]. Chinese Journal of Mechanical Engineering, 2007, 44(6):10-14(in Chinese). |
[22] | CHAKRAPANI S K, PADIYAR M J, BALASUBRAMANIAM K. Crack detection in full size Cz-Silicon wafers using Lamb wave air coupled ultrasonic testing (LAC-UT)[J]. Journal of Nondestructive Evaluation, 2012, 31(1):46-55. |