|
OALib Journal期刊
ISSN: 2333-9721
费用：99美元
|
|
|
|
同质异构ssio2/msio2核/壳复合磨粒的合成
Keywords: 无机非金属材料,介孔氧化硅,核壳结构,复合磨粒,化学机械平坦化
Abstract:
？以正硅酸乙酯为硅源、以氨水为催化剂、十六烷基三甲基溴化铵为结构导向模板剂,在单分散实心氧化硅(solid-sio2,ssio2)内核表面包覆介孔氧化硅(mesoporous-sio2,msio2)外壳,合成了同质异构氧化硅(ssio2/msio2)核/壳复合磨粒。用小角xrd、fesem、hrtem、ftir、tga和氮气吸附-脱附等手段对样品的结构进行了表征。结果表明,具有放射状介孔孔道的msio2均匀连续包覆在ssio2内核(210-230nm)外表面,形成了厚度为70-80nm的外壳。壳层中的介孔孔道(孔径约2-3nm)基本垂直于内核表面,且复合磨粒样品具有较大的比表面积(558.2m2/g)。用afm形貌分析和轮廓分析评价了所制备的复合磨粒对sio2薄膜的抛光特性。与常规实心sio2磨粒相比,ssio2/msio2复合磨粒明显改善了抛光表面质量并提高了材料去除率。这可能归因于msio2壳层通过机械和/或化学方面的作用对磨粒与衬底之间真实界面接触环境的优化。
| [1] | 1e.l.h.thomas,g.w.nelson,s.mandal,j.s.foord,o.a.williams,chemicalmechanicalpolishingofthinfilmdiamond,carbon,68,473(2014)
|
| [2] | 2y.zhou,g.pan,x.shi,l.xu,c.zou,h.gong,g.luo,xps,uv-visspectroscopyandafmstudiesonremovalmechanismsofsi-facesicwaferchemicalmechanicalpolishing(cmp),appliedsurfacescience,316,643(2014)
|
| [3] | 5m.fu,l.wei,y.li,x.zhou,s.hao,y.li,surfacechargetuningofceriaparticlesbytitaniumdoping:towardssignificantlyimprovedpolishingperformance,solidstatescience,11(12),2133(2009)
|
| [4] | 8s.armini,c.m.whelan,k.maex,j.l.hernandez,m.moinpourc,compositepolymercore-silicashellabrasiveparticlesduringoxidecmp:adefectivitystudy,journaloftheelectrochemicalsociety,154(8),h667(2007)
|
| [5] | 10a.l.chen,w.b.mu,y.chen,compressiveelasticmoduliandpolishingperformanceofnon-rigidcore/shellstructuredps/sio2compositeabrasivesevaluatedbyafm,appliedsurfacescience,290,433(2014)
|
| [6] | 12h.lei,x.wu,r.chen,preparationofporousaluminaabrasivesandtheirchemicalmechanicalpolishingbehavior,thinsolidfilms,520(7),2868(2012)
|
| [7] | 16y.chen,z.li,n.miao,synergeticeffectoforganiccoresandinorganicshellsforcore/shellstructuredcompositeabrasivesforchemicalmechanicalplanarization,appliedsurfacescience,314,180(2014)
|
| [8] | 17r.chen,r.jiang,h.lei,m.liang,materialremovalmechanismduringporoussilicaclusterimpactoncrystalsiliconsubstratestudiedbymoleculardynamicssimulation,appliedsurfacescience,264,148(2013)
|
| [9] | 3f.ilie,modelsofnanoparticlesmovement,collision,andfrictioninchemicalmechanicalpolishing(cmp),journalofnanoparticleresearch,14,752(2012)
|
| [10] | 4d.guo,g.xie,j.luo,mechanicalpropertiesofnanoparticles:basicsandapplications,journalofphysicsd:appliedphysics,47,013001(2014)
|
| [11] | 6x.feng,d.c.sayle,z.l.wang,m.s.paras,b.santora,a.c.sutorik,t.x.t.sayle,y.yang,y.ding,x.wang,y.her,convertingceriapolyhedralnanoparticlesintosingle-crystalnanospheres,science,312(6),1504(2006)
|
| [12] | 7x.zhao,r.long,y.chen,z.chen,synthesis,characterizationofceo2@sio2nanoparticlesandtheiroxidecmpbehavior,microelectronicengineering,87(9),1716(2010)
|
| [13] | 9s.armini,j.demessemaeker,c.m.whelan,m.moinpour,k.maex,compositepolymercore-ceriashellabrasiveparticlesduringoxidecmp:adefectivitystudy,journaloftheelectrochemicalsociety,155(9),h653(2008)
|
| [14] | 11chenyang,longrenwei,chenzhigang,dingjianning,synthesisofps-coreceria-shellcompositeabrasiveanditsapplicationinoxidecmp,tribology,30(1),9(2010)(陈杨,隆仁伟,陈志刚,丁建宁,核-壳结构ps/ceo2复合磨料的制备及其氧化物化学机械抛光性能,摩擦学学报,30(1),9(2010))
|
| [15] | 13h.lei,l.jiang,r.chen,preparationofcopper-incorporatedmesoporousaluminaabrasiveanditscmpbehavioronharddisksubstrate,powdertechnology,219,99(2012)
|
| [16] | 14h.li,h.lei,r.chen,preparationofporousfe2o3/sio2nanocompositeabrasivesandtheirchemicalmechanicalpolishingbehaviorsonharddisksubstrates,thinsolidfilms,520(19),6174(2012)
|
| [17] | 15s.chen,h.lei,r.chen,preparationofporousalumina/ceriacompositeabrasiveanditschemicalmechanicalpolishingbehavior,journalofvacuumscience&technologyb,31,021804(2013)
|
| [18] | 18w.st?ber,a.fink,e.bohn,controlledgrowthofmonodispersesilicaspheresinthemicronsizerange,journalofcolloidandinterfacescience,26,62(1968)
|
| [19] | 19s.f.resende,e.h.m.nunes,m.houmard,w.l.vasconcelos,simplesol-gelprocesstoobtainsilica-coatedanataseparticleswithenhancedtio2-sio2interfacialarea,journalofcolloidandinterfacescience,433,211(2014)
|
| [20] | 20z.ran,y.sun,b.chang,q.ren,w.yang,silicacompositenanoparticlescontainingfluorescentsolidcoreandmesoporousshellwithdifferentthicknessasdrugcarrier,journalofcolloidandinterfacescience,410,94(2013)
|
| [21] | 21m.yang,g.wang,z.yang,synthesisofhollowsphereswithmesoporoussilicananoparticlesshell,materialschemistryandphysics,2008,111(1),5(2008)
|
| [22] | 22a.mathew,s.parambadath,s.s.park,c.ha,hydrophobicallymodifiedsphericalmcm-41asnanovalvesystemforcontrolleddrugdelivery,microporousandmesoporousmaterials,200,124(2014)
|
| [23] | 23jiyongjun,zhangbin,zhangkun,xule,penghonggen,wupeng,core/shell-structuredzsm-5@mesoporoussilicacompositesforshape-selectivealkylationoftoluenewithmethanol,actachimicasinica,71,371(2013)(纪永军,张斌,张坤,徐乐,彭洪根,吴鹏,zsm-5@mesoporoussilica核壳复合结构分子筛的制备及其甲苯甲醇烷基化择形催化性能的研究,化学学报,71,371(2013))
|
| [24] | 24qijuanjuan,xudongyao,caiqiang,zhangwei,preparationandcharacterizationofradiallyporoussilicaandthecore-shellstructure,chemicaljournalofchineseuniversities,33(4),652(2012)(齐娟娟,徐东耀,蔡强,张伟,放射孔二氧化硅及其核壳结构的制备与表征,高等学校化学学报,33(4),652(2012))
|
| [25] | 25l.h.he,o.c.standard,t.t.y.huang,b.a.latella,m.v.swain,mechanicalbehaviorofporoushydroxyapatite,actabiomaterialia,4(3),577(2008)
|
| [26] | 26p.clément,s.meille,j.chevalier,c.olagnon,mechanicalcharacterizationofhighlyporousinorganicsolidsmaterialsbyinstrumentedmicro-indentation,actamaterialia,61(18),6649(2013)
|
| [27] | 27d.jauffrès,c.yacou,m.verdier,r.dendievel,a.ayral,mechanicalpropertiesofhierarchicalporoussilicathinfilms:experimentalcharacterizationbynanoindentationandfiniteelementmodeling,microporousandmesoporousmaterials,140(1-3),120(2011)
|
| [28] | 28v.valtchev,l.tosheva,porousnanosizedparticles:preparation,properties,andapplications,chemicalreviews,113,6734(2013)
|
| [29] | 29s.armini,i.u.vakarelski,c.m.whelan,k.maex,k.higashitani,nanoscaleindentationofpolymerandcompositepolymer-silicacore-shellsubmicrometerparticlesbyatomicforcemicroscopy,langmuir,23(4),2007(2007)
|
| [30] | 30y.chen,j.lu,z.chen,young'smodulusofps/ceo2compositewithcore/shellstructuremicrospheresmeasuredusingatomicforcemicroscopy,j.nanopart.res.,14(2),696(2012)
|
| [31] | 31mengfanming,gaoguixiang,wangxueli,tribologicalperformanceofdiatomshellwithporousstructure,tribology,34(5),504(2014)(孟凡明,高贵响,王雪丽,硅藻壳孔状结构的摩擦学性能研究,摩擦学学报,34(5),504(2014))
|
Full-Text
|
|
Contact Us
service@oalib.com QQ:3279437679 
WhatsApp +8615387084133
|
|
