Kohli C H, Moser J, Prasad K, et al. , Characterization of lithium tantalite thin films sputter-deposited onto RuO2/Si Substrates [J]. Microelec. Eng. , 1995, 29: 201-204.
[3]
Wemberg A A, Braunstein G H, Gysling H J. Improved solid phase epitaxial growth of lithium tantalate thin films on sapphire, using a two-step metalorganic chemical-vapor deposition process [J], Appl. Phys. Lett., 1993,63(19): 2649-2651.
[4]
ZHANG De-Yin, HUANG Da-Gui, HE Yan-Qiu. Intelligent temperature control strategy for LiTaO3 thin films deposition process [C], 2004 IEEE Conference on Intelligent Machatronics and Automation, Aug. 25-28, Chengdu, China, 2004 : 339-344.
[5]
Kao M C, Lee M S, Wang C M, et al. , Properties of LiTaO3 thin films derived by a diol-based sol-gel process [J], Jpn. J. appl. Phys., 2002, 41: 2982-2986.
LI Jin-Hua, YUAN Ning-Yi, LI Kun, et al. A comparison of ferroelectric properties of sol-gel PLT films on different electrodes[J], Ferroelectrics, 2001, 260(1-4): 533-538.
