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核技术  2014 

PET核孔膜蚀刻速率影响因素的研究

DOI: 10.11889/j.0253-3219.2014.hjs.37.040203, PP. 40203-40203

Keywords: 核孔膜,电导法,径迹蚀刻速率,体蚀刻速率,能量损失率

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Abstract:

核孔膜是通过重离子照射薄膜后进行化学蚀刻所得到的高性能过滤材料,蚀刻速率是影响高质量核孔膜制备的重要因素。本文探讨了不同蚀刻液浓度、温度以及重离子辐照能量对蚀刻速率的影响。利用140MeV的32S离子在室温和真空条件下对4层堆叠的PET(polyethyleneterephthalate)薄膜进行了辐照。在对辐照样品进行化学蚀刻期间采用电导法确定了径迹蚀刻速率Vt。结果表明:蚀刻速率与蚀刻温度呈指数相关,随蚀刻液浓度增加而线性增大;径迹蚀刻速率随能量损失率(离子能损)增大。研究确定,在入射32S能量为1.6MeV?u?1时,NaOH浓度为1mol?L?1、蚀刻温度为85°C时最有利于形成圆柱形微孔。

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