祁洪飞, 刘大博. 薄膜生长工艺对TiO2基紫外探测器光电性能的影响[J].航空材料学报, 2011, 31(5):47-50. QI H F, LIU D B. Effect of growth technology of TiO2 film on photoelectronic properties of TiO2 UV detector[J]. Journal of Aeronautical Materials, 2011, 31(5):47-50.
[2]
梁继然, 胡明, 阚强, 等.晶粒尺寸对氧化钒薄膜电学与光学相变特性的影响[J].材料工程, 2011, (4):58-63. LIANG J R, HU M, KAN Q, et al. Effects of grain size on resistance and transmittance transition of vanadium oxide thin film[J]. Journal of Materials Engineering, 2011, (4):58-63.
[3]
卢进军, 刘卫国.光学薄膜技术[M].西安:西北工业大学出版社, 2005.
[4]
辛荣生, 林钰, 贾晓林.工艺条件对柔性衬底ITO薄膜光电性能的影响[J].电子元件与材料, 2009, 28(6):43-45. XIN R S, LIN Y, JIA X L. Effect of technological conditions on the electrical and optical properties of flexible ITO films[J]. Electronic Components and Materials, 2009, 28(6):43-45.
[5]
王军, 成建波, 饶海波, 等.磁控溅射低阻ITO薄膜的气体参数优化[J].压电与声光, 2007, 29(1):115-117. WANG J, CHENG J B, RAO H B, et al. Optimizing gas parameters of low-resistance ITO films prepared by DC magnetron sputtering[J]. Piezoelectectrics & Acoustooptics, 2007, 29(1):115-117.
[6]
余焜.材料结构分析基础[M].北京:科学出版社, 2010.
[7]
袁红梅, 林祖伦, 陈文彬, 等.溶胶-凝胶法制备ITO薄膜及光电性能的研究[J].电子器件, 2010, 33(1):5-9. YUAN H M, LIN Z L, CHEN W B, et al. Electrical and optical properties of ITO films prepared by the sol-gel method[J]. Chinese Journal of Electronic Devices, 2010, 33(1):5-9.
[8]
罗飞, 王锦鹏, 陶春虎, 等. 化学液相沉积制备PbSe薄膜生长过程及其性能研究[J].航空材料学报, 2011, 31(2):33-36. LUO F, WANG J P, TAO C H, et al. Study of deposition process and properties of PbSe films grown by chemical liquid deposition[J]. Journal of Aeronautical Materials, 2011, 31(2):33-36.
[9]
王树林, 夏冬林.ITO薄膜的制备工艺及进展[J].玻璃与搪瓷, 2004, 32(5):51-54.WANG S L, XIA D L. Fabrication techniques and development of ITO film[J]. Glass & Enamel, 2004, 32(5):51-54.
[10]
LIN Y C, LI J Y, YEN W T. Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering[J]. Applied Surface Science, 2008, 254(11):3262-3268.
[11]
HICHOU A EI, KACHOUANE A, BUBENDORFF J L, et al. Effect of substrate temperature on electrical, structural, optical and cathodoluminescent properties of In2O3-Sn thin films prepared by spray pyrolysis[J]. Thin Solid Films, 2004, 458(1-2):263-268.
[12]
GEORGE J, MENON C S. Electrical and optical properties of electron beam evaporated ITO thin films[J]. Surface and Coatings Technology, 2000, 132(1):45-48.
[13]
ALAM M J, CAMERON D C. Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process[J]. Thin Solid Films, 2000, 377-378:455-459.
[14]
KIM H, HORWITZ J S, KUSHTO G P, et al. Indium tin oxide thin films grown on flexible plastic substrates by pulsed-laser deposition for organic light-emitting diodes[J]. Applied Physics Letters, 2001, 79(3):284-286.
[15]
KIM Y S, PARK Y C, ANSARI S G, et al. Influence of O2 admixture and sputtering pressure on the properties of ITO thin films deposited on PET substrate using RF reactive magnetron sputtering[J].Surface and Coatings Technology, 2003, 173(2-3): 299-308.
[16]
赵佳明, 边继明, 孙景昌, 等.柔性聚酰亚胺(PI)衬底上ITO薄膜的生长及其透明导电性能影响机制研究[J].功能材料, 2011, 42:644-647.ZHAO J M, BIAN J M, SUN J C, et al. Growth and transparent conductive properties of ITO films on flexible polyimide (PI) substrates[J].Journal of Functional Materials, 2011, 42:644-647.
[17]
LIN Y C, SHI W Q, CHEN Z Z. Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering[J]. Thin Solid Film, 2009, 517(5):1701-1705.
