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材料工程  2014 

TiO2纳米孔到纳米管结构转变的因素及其机理研究

DOI: 10.3969/j.issn.1001-4381.2014.01.011

Keywords: 钛膜,TiO2纳米孔,TiO2纳米管,氟离子浓度,阳极氧化电压

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Abstract:

通过中频脉冲磁控溅射的方法,在玻璃基底上沉积得到了表面均匀性好、致密度高的钛薄膜。在NH4F/乙二醇+H2O电解液体系中对该钛膜进行电化学阳极氧化。结果表明30V恒电压下,当NH4F浓度从0.5%(质量分数,下同)增加到1%时,阳极氧化后形成的TiO2膜层逐渐从纳米孔结构转变成纳米管结构;当NH4F浓度低于0.75%时,随阳极氧化电压的增加,形成的TiO2膜层不会出现从纳米孔到纳米管结构的转变。

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