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OALib Journal期刊
ISSN: 2333-9721
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光纤连接器端面的显微干涉测试系统
, PP. 84-87
Keywords: 光纤连接器,显微干涉,Mirau物镜,相移干涉,相位提取
Abstract:
介绍了一种基于显微干涉的光纤连接器端面的测试系统,干涉仪由Mirau干涉物镜和镜筒透镜组成,CCD相机采集干涉图样,经处理后得到相位分布图.采用Carre相位提取算法,无需进行特定步长的相移.对光纤连接器端面的表面形貌、曲率半径、顶点偏移进行测量,测量系统的横向分辨率可达到0.9μm,重复性测量精度为9.5nm.
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