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纳米阳极氧化铝模板膜孔可控生长规律

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Abstract:

采用新的二次阳极氧化工艺,制备了多孔纳米阳极氧化铝(anodizedAl2O3,AAO)膜。对铝在草酸溶液中的二次阳极氧化过程进行了研究。利用扫描电镜、原子力显微镜、透射电镜等对其形貌进行了表征和分析。结果表明用高纯铝所制备的纳米AAO膜孔大小一致,有序性强;膜的孔径随扩孔时间的增加而增大,随草酸浓度的增加而减少。进一步延长扩孔时间至1.5h,其孔径生长规律仍符合AAO膜孔径可控性动力学模型方程,使原模型的扩孔时间范围由1.0h拓展到1.5h。AAO膜的最佳制备工艺为采用0.3mol/L草酸溶液,电压为40V,在40℃氧化9h和扩孔1h。在最佳制备工艺条件下,制备的AAO膜厚为112.7μm,孔径为70nm左右。

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