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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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Ti对磁控溅射不锈钢薄膜结构的影响
, PP. 81-84
Keywords: 磁控溅射,薄膜,321不锈钢,Ti
Abstract:
研究了磁控溅射321不锈钢薄膜内Ti对膜结构由晶态向非晶态转化的影响用X射线衍射分析了膜的结构,结果表明,膜的结构随含Ti量不同而有变化在Ti含量(wt-％)为0—3,3—10,10-18,18-30时,膜的结构分别为α-Fe,α-Fe+x相,非晶+微晶,非晶态
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